Research on the Experiment of ZnO Thin Film by Pulsed Laser Deposition

Qiang Ke; Yi Fan Wang; Ju Ju Hu

doi:10.4028/www.scientific.net/AMR.476-478.2379

Paper Titles

Effects of Pulsed Negative Bias and Current Density on Properties of N-Doped TiO₂ Films Deposited by Arc Ion Plating
p.2357

Preparation of Ultra-High Molecular Weight Polyethylene Microporous Membranes via Thermally Induced Phase Separation
p.2363

Microstructure and Properties of Laser Clad Nonmagnetic WC-FeNiCr Metal-Matrix Composite Coating
p.2368

First-Principles Study of Electronic Structure of V-Si-N Nanocomposite Thin Film
p.2374

Research on the Experiment of ZnO Thin Film by Pulsed Laser Deposition
p.2379

A Method of Fault Detection and Diagnosis for Electromagnetic Direction Valve Based on Artificial Neural Network
p.2384

Post-Processing and Properties of Polyethersulfone Hollow Fiber Membrane
p.2389

Study on the Tensile Fracture Characteristics of Cars Oil Filter Materials
p.2393

Preparation and Characterization of TiO₂ Photocatalytic Thin Film Prepared by Sol-Gel Dip Coating
p.2398

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Research on the Experiment of ZnO Thin Film by Pulsed Laser Deposition

Abstract:

Using experiment method, ZnO films are prepared at various substrate temperatures, annealing temperatures and oxygen pressures. The films are examined by X-ray diffraction, atomic force microscope. Through researching the structural and optical properties of ZnO films, optimized conditions for growing ZnO films are obtained. The results suggest that high quality ZnO films with high c-axis orientation can be prepared by pulse laser deposition.