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Effect of Oxygen on CVD Diamond Film Deposition
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Effect of Oxygen on CVD Diamond Film Deposition
Abstract:
CVD diamond films were synthesized by the chemical vapor deposition method. With increasing the oxygen content in the deposition atmosphere, the density of diamond nuclei decreases. No diamond is formed when the oxygen content is more than one percent. The density of diamond nuclei is improved with increasing the methane content. Adding oxygen to the deposition atmosphere can enhance the purity of diamond.
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Periodical:
Advanced Materials Research (Volumes 482-484)
Pages:
891-894
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Online since:
February 2012
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© 2012 Trans Tech Publications Ltd. All Rights Reserved
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