Steady State Response Simulation of a 2-D Micromirror in Simulink

Tomas Skulavik; Peter Schreiber; Oliver Moravčik

doi:10.4028/www.scientific.net/AMR.488-489.1646

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 488-489Steady State Response Simulation of a 2-D...

Steady State Response Simulation of a 2-D Micromirror in Simulink

Abstract:

Micromirrors fabricated by MEMS technology may be important sensing components in optical tracking systems used in many industrial applications. This paper deals with the analytical model of a 2-D gimbal mounted micromirror and with the simulation of a steady state response of the micromirror in Simulink. The model of a 2-D micromirror should be further used in a simulation of its dynamical behavior.

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Periodical:

Advanced Materials Research (Volumes 488-489)

Pages:

1646-1650

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.488-489.1646

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Online since:

March 2012

Authors:

Tomas Skulavik, Peter Schreiber, Oliver Moravčik

Keywords:

Analytical Model, Micromirror, Steady State Response

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References

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