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Design of a Precision Three-Coordinate Measuring Machine Based on SCM
Abstract:
A low-lost, easily-use, non-contact three-coordinate measuring machine was researched and designed by using a laser head of CD-ROM as its detecting element, which could measure the micro-displacement of surface precisely. Researching and taking full advantage of the auto-focusing detecting principle and process circuit of CD-ROM, the machine simulated the action of disk read by using the MCU AT89S52, and read the voltage value of voice coil motor as the Z-coordinate’s value of this point. The system could work in 0.1 μm of the range of 20μm, which might be used to measure the figure of super smooth surface.
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2430-2434
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Online since:
March 2012
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© 2012 Trans Tech Publications Ltd. All Rights Reserved
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