Strength Analysis of Flexure Hinge Mechanism in XY Table

Xiao Mei Feng; Li Shun Li; Wen Kai Liu; Da Wei Zhang

doi:10.4028/www.scientific.net/AMR.490-495.2982

Paper Titles

The Model Analysis of Mobile Emergency Platform Car Frame Based on ANSYS
p.2961

Linear Regression Calculation and Energy Saving Analysis about Thermotechnical Parameters of Target Type Impinging Stream Nozzles
p.2966

Nuclear Polarization and Σ ¯ Atom Energy Levels
p.2971

The Finite Element Analysis on the Submarine Pipeline under the Seismic Loading
p.2977

Strength Analysis of Flexure Hinge Mechanism in XY Table
p.2982

Research on Aerodynamic Noise of Base Styling Characteristics of Car Rearview Cover
p.2987

Research on Technology of Responding for Multi-Specification and Small-Batch Mechanical Production Quotation Based on Feedback Amendment
p.2992

Research on QoS of ertPS of 802.16e Scheduling Algorithms
p.2998

The Functional Configuration Mapping for Cloud-Based Mass Customization Service Platform
p.3003

HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 490-495Strength Analysis of Flexure Hinge Mechanism in XY...

Strength Analysis of Flexure Hinge Mechanism in XY Table

Abstract:

A new 2-DOF positioning table of high speed and accuracy, directly driven by voice coil actuator, is put forward. And a novel elastic decoupling mechanism is used in the table. As the key component of the elastic decoupling mechanism, the flexure hinge is studied, including its stiffness, maximum stress and inherence frequency. The analysis results show that the flexure hinge meets the design requirement.

You might also be interested in these eBooks

Mechatronics and Intelligent Materials II

View Preview

Info:

Periodical:

Advanced Materials Research (Volumes 490-495)

Pages:

2982-2986

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.490-495.2982

Citation:

Cite this paper

Online since:

March 2012

Authors:

Xiao Mei Feng, Li Shun Li, Wen Kai Liu, Da Wei Zhang

Keywords:

Distortion, FEA Model, Flexure Hinge, Positioning Table, Stress

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] Kuang-Chao Fan, Mu-Jung Chen: A 6-degree-of-freedom measurement system for the accuracy of X-Y stages, Precision Engineering, No. 24(2000), pp.15-23.

DOI: 10.1016/s0141-6359(99)00021-5

Google Scholar

[2] S. Endo, H. Kobayashi, C.J. Kempt, et al: Robust digital tracking controller design for high-apeed positioning system, Control Eng. Practice, Vol. 4. No. 4(1996), pp.527-536.

DOI: 10.1016/0967-0661(96)00036-6

Google Scholar

[3] Ken Yanagisawa, et al: Two dimensional drive system, U.S. Patent 006, 327, 929 B1(2001).

Google Scholar

[4] Akira Tamaki: Means for location an ultra-precision position of a table, U.S. Patent 4, 590, 380(1986).

Google Scholar

[5] Ronald K. Kerschner: Differential motor drive for an XY stage, U.S. Patent 006, 070, 480 A(2000).

Google Scholar