Deflection and Resonance Frequency Shift of a Microcantilever Induced by Chemisorption: Oxygen on Si(100)

Article Preview

Abstract:

An energy-based model is presented to predict the deflection and resonance frequency shift of a microcantilever induced by chemisorption. The chemisorption of oxygen on Si(100) surface is taken as a representative example. The connection between the continuum-level cantilever responses (e.g. static deflection, resonance frequency) and the molecular-level interactions (covalent bond interactions) are established. The mechanical behavior of the cantilever on the density of adsorbed atoms/molecules and the property of the substrate is investigated. This study is helpful for designing microcantilever-based sensors which have many technologically important applications

You might also be interested in these eBooks

Info:

Periodical:

Advanced Materials Research (Volumes 503-504)

Pages:

455-458

Citation:

Online since:

April 2012

Export:

Price:

Permissions CCC:

Permissions PLS:

Сopyright:

© 2012 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

[1] N.V. Lavrik, M.J. Sepaniak and P.G. Datskos: Rev. Sci. Instrum. Vol. 75 (2004), p.2229–2253.

Google Scholar

[2] J. Fritz, M.K. Baller, H.P. Lang et.al: Science Vol. 288 (2000), p.316–318.

Google Scholar

[3] T. Thundat, E.A. Wachter, S.L. Sharp et.al: Appl. Phys. Lett. Vol. 66 (1995), p.1695–1697.

Google Scholar

[4] D.W. Dareing and T. Thundat: J. Appl. Phys. Vol. 97 (2005), p.043526/1–5.

Google Scholar

[5] G.Y. Huang, W. Gao and S.W. Yu: Appl. Phys. Lett. Vol. 89 (2006), p.043506/1–3.

Google Scholar

[6] J.Q. Zhang, S.W. Yu, X.Q. Feng et.al: J. Appl. Phys. Vol. 103 (2008), p.093506/1–6.

Google Scholar

[7] J.Q. Zhang, S.W. Yu and X.Q. Feng: J. Phys. D: Appl. Phys. Vol. 41 (2008), p.125306/1–8.

Google Scholar

[8] X. Yi and H.L. Duan: J. Mech. Phys. Solids Vol. 57 (2009), p.1254–1266.

Google Scholar

[9] R.E. Miller and V.B. Shenoy: Nanotechnology Vol. 11 (2000), pp.139-147.

Google Scholar

[10] I.P. Batra, P.S. Bagus and K. Hermann: Phys. Rev. Lett. Vol. 52 (1984), p.384–387.

Google Scholar

[11] I. Ohdomari, H. Akatsu, Y. Yamakoshi et.al: J. Non-Cryst. Solids Vol. 89 (1987), p.239–248.

Google Scholar