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Deflection and Resonance Frequency Shift of a Microcantilever Induced by Chemisorption: Oxygen on Si(100)
Abstract:
An energy-based model is presented to predict the deflection and resonance frequency shift of a microcantilever induced by chemisorption. The chemisorption of oxygen on Si(100) surface is taken as a representative example. The connection between the continuum-level cantilever responses (e.g. static deflection, resonance frequency) and the molecular-level interactions (covalent bond interactions) are established. The mechanical behavior of the cantilever on the density of adsorbed atoms/molecules and the property of the substrate is investigated. This study is helpful for designing microcantilever-based sensors which have many technologically important applications
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455-458
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April 2012
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© 2012 Trans Tech Publications Ltd. All Rights Reserved
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