Fabrication of AR Film Using Nano-Imprint Process with a Diamond Mold

Abstract:

Owning to the robust characteristics of diamonds, a nano-tip array structured mold was fabricated with diamond, we can then use this mold to produce anti-reflection (AR) films with nanoimprint lithography. Taking advantage of the self-ordered characteristic of anodic aluminum oxide (AAO), we can obtain the diamond mold by depositing a layer of diamond on the AAO using hot filament chemical vapor deposition (HFCVD). Then taking advantage of the high through-put characteristics of nanoimprint lithography, AR films can be mass produced. The AR films were subjected to reflectivity inspections, a 5.5% reduction in reflectivity was obtained.

• Periodical: Advanced Materials Research (Volumes 512-515)
• Pages: 2072-2075
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.512-515.2072
• Online since: May 2012
• Authors: Hung Yin Tsai, Ching Wen Liu, Chia Jen Ting
• Keywords: Anti-Reflection Film, Diamond Mold, Nanoimprint

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