A Zero-Dimensional Model to Predict the Performance of the Claw Type Vacuum Pump

Abstract:

A new type of mechanical vacuum pump is introduced in this paper. It is composed of two conjugated rotors spinning in opposite directions. The shape of rotor looks like a claw, and it is called a claw vacuum pump. A zero dimensional model was used in this paper to analyze the performance of this vacuum pump. The whole system was decomposed into five subsystems. Each subsystem has its own values in temperature, pressure and mass. The pressure variations and the temperature variations as well as the work required to complete the whole cycle were calculated with this model. It was found that the major leakage route is from exit port to chamber. The averaged outlet temperature may reach 483K. However, inner leakage may ease the problem of high temperature flow.

• Periodical: Advanced Materials Research (Volumes 516-517)
• Pages: 866-871
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.516-517.866
• Online since: May 2012
• Authors: Jau Huai Lu, Hsueh Hsuan Chen, Tsang Lin Hsu, Ci Liang Guo, Jung Feng Yeh
• Keywords: Claw Pump, Leakage, Vacuum Pump, Zero Dimensional Model

References

[1] Tien-Tung Chung, Hsu-Tsang Lin, Heng-I Lin, Chin-Tei Lin, Tai-Hsiang Chou and Shao-Wei Lee: Design and Analysis of a New Claw Rotor Engine, the 25th National Conference of CSME, (2007).

[2] Laurent-Charles Valdes, Benoõöt Barthod, and Yves Le Perron: Accurate prediction of internal leaks in stationary dry Roots vacuum pumps, Vacuum 52 (1999) , pp.451-459.

DOI: 10.1016/s0042-207x(98)00330-3

[3] Jau-Huai Lu, Hsueh-Hsuan Chen, Tsang-Lin Hsu, Ci-Liang Guo, Jung-Feng Yeh, and Hsuan-Hsun Lin: Air Standard Cycle Analysis of the Performance of Claw Type Vacuum Pump, 2011 Conference of Taiwan Vacuum Society (2011).