Parameter Selection Rules for Error Separation by Multi-Probe Method

Abstract:

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The measuring precision of error separation technology is directly related to error separation parameters selection. If the parameter selection rules aren’t followed correctly, the accuracy of error separation will be affected badly, and even the error figure got will be a distortion result. Through a discussion on the characters of error separation technology, eight rules for choosing error separation parameters of multi-probe method are made in this paper. These rules are regarded as the general laws to follow when measuring the geometrical error by multi-probe method. Based on the results of the online measurement experiment, the parameter selection rules are proved to be effective.

Info:

Periodical:

Advanced Materials Research (Volumes 53-54)

Edited by:

Shengqiang Yang, Shichun Yang and Hang Gao

Pages:

421-427

DOI:

10.4028/www.scientific.net/AMR.53-54.421

Citation:

L. Zhang et al., "Parameter Selection Rules for Error Separation by Multi-Probe Method", Advanced Materials Research, Vols. 53-54, pp. 421-427, 2008

Online since:

July 2008

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Price:

$35.00

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