Microstructure and Mechanical Properties of Cr1-xAlxN Coating

Article Preview

Abstract:

A series of Cr1-xAlxN coatings were deposited by reactive magnetron sputtering. The content, microstructure and the hardness of the thin films were characterized respectively with energy dispersive X-ray spectroscopy (EDS), X-ray diffraction (XRD) and nanoindentor. The effect of Al content on the microstructure and hardness was studied. It was found that Cr1-xAlxN compound coating exhibits a cubic structure with (1 1 1) preferred orientations and that the lattice parameter of Cr1-xAlxN coatings decrease with the increase of Al content. The hardness of Cr1-xAlxN compound coating is higher than that of CrN and increases with the increase of Al content.

You might also be interested in these eBooks

Info:

Periodical:

Pages:

3-6

Citation:

Online since:

June 2012

Authors:

Export:

Price:

Permissions CCC:

Permissions PLS:

Сopyright:

© 2012 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

[1] R. Nowak, S. Maruno: Mater. Sci. Eng. A Vol. 202 (1995), p.226.

Google Scholar

[2] C. Meunier, S. Vives, G. Bertrand : Surf. Coat. Technol. Vol. 107 (1998), p.149.

Google Scholar

[3] B. Y. Man, L. Guzman, A. Miotello: Surf. Coat. Technol. Vol. 180-181 (2004), p.9.

Google Scholar

[4] D. B. Lee, M. H. Kim, Y. C. Lee: Surf. Coat. Technol. Vol. 141 (2001), p.232.

Google Scholar

[5] R. Varughese, A. W. Pense: Materials Characterization Vol. 30 (1993), p.35.

Google Scholar

[6] W.D. Munz: J. Vac. Sci. Technol. A Vol. 4 (1986), p.2717.

Google Scholar

[7] J.H. Hsieh, C. Liang, C.H. Yu, et al : Surf. Coat. Technol. Vol. 108–109 (1998) 132.

Google Scholar

[8] A. Kondo, T. Oogami, K. Sato, et al: Surf. Coat. Technol. Vol. 177-178 (2004), p.238.

Google Scholar

[9] P. Beer, M. A. Djouadi, R. Marchal, et al: Journal of Materials Processing Technol. Vol. 92-93(1999), p.264.

Google Scholar

[10] Per Hedenqvist, Staffan Jacobson, Sture Hogmark: Surf. Coat. Technol. Vol. 97(1997), p.656.

Google Scholar

[11] Hui-Ping Feng, Cheng-Hsun Hsu, Jung-Kai Lu, et al: Materials Science and Engineering A. Vol. 347 (2003), p.123.

Google Scholar

[12] Xing-Zhao Ding, X.T. Zeng: Surf. Coat. Technol. Vol. 200(2005), p.1372.

Google Scholar

[13] A. Kayani, T.L. Buchanan, M. Kopczyk, et al: Surf. Coat. Technol. Vol. 201(2006), p.4460.

Google Scholar

[14] Harish C. Barshilia, N. Selvakumar: Surf. Coat. Technol. Vol. 201(2006), p.2193.

Google Scholar

[15] S. PalDey, S.C. Deevi: Mater. Sci. Eng. A Vol. 342 (2003), p.58.

Google Scholar

[16] M. Zhou, Y. Makino, M. Nose, K. Nogi: Thin Solid Films Vol. 339 (1999), p.203.

Google Scholar

[17] H. Hollek: J. Vac. Sci. Technol. A Vol. 4 (1986), p.2661.

Google Scholar