An Experimental Study of the Abrasive Water Jet Micro-Machining Process for Quartz Crystals

Abstract:

An experimental study of the machining process for micro-channels on a brittle quartz crystal material by an abrasive slurry jet (ASJ) is presented. A statistical experiment design considering the major process variables is conducted, and the machined surface morphology and channelling performance are analysed to understand the micro-machining process. It is found that a good channel top edge appearance and bottom surface quality without wavy patterns can be achieved by employing relatively small particles at shallow jet impact angles. The major channel performance measures, i.e. material removal rate (MRR) and channel depth, are then discussed with respect to the process parameters. It shows that with a proper control of the process variables, the abrasive water jet (AWJ) technology can be used for the micro-machining of brittle materials with high quality and productivity.

• Periodical: Advanced Materials Research (Volume 565)
• Pages: 339-344
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.565.339
• Online since: September 2012
• Authors: H. Qi, J.M. Fan, Jun Wang
• Keywords: Abrasive Water Jet (AWJ), Machining Performance, Micro Machining, Quartz Crystal

References

[1] J. Wang: Abrasive waterjet machining of engineering materials, (Trans Tech Publications, Uetikon-Zuerich, Switzerland, 2003).

[2] T. Makimura, S. Mitani, Y. Kenmotsu, K. Murakami, M. Mori and K. Kondo: Appl. Phys. Lett., vol. 85 (2004) pp.1274-1276.

DOI: 10.1063/1.1782265

[3] E. Bamberg and S. Heamawatanachai: J. Mater. Process. Technol. , vol. 209 (2009) pp.1826-1834.

[4] H.T. Ting, K.A. Abou-El-Hossein and H.B. Chua: T. Nonferr. Metal. Soc., vol. 19 (2009) p. S1-S16.

[5] R. Kovacevic, M. Hashish, R. Mohan, M. Ramulu, T.J. Kim and E.S. Geskin: J. Manuf. Sci. Eng., vol. 119 (1997) pp.776-785.

[6] J. Wang, T. Nguyen and K.L. Pang: J Appl Phys, vol. 105 (2009) p.044906.

[7] K.L. Pang, T. Nguyen, J.M. Fan and J. Wang: Key Eng. Mat., vol. 443 (2010) pp.639-644.

[8] M.J. McCarthy and N.A. Molloy: Chem. Eng. J., vol. 7 (1974) pp.1-20.

[9] J. Wang: Key Eng. Mat., vol. 238-239 (2003) pp.117-124.

[10] M.S. Bingley, T. Deng, M.S.A. Bradley and S.R. De Silva: Wear, vol. 265 (2008) pp.945-955.

[11] S.K. Bhunia and J.H. Lienhard: J. Fluid ENG-T Asme vol. 116 (1994) pp.338-344.

[12] A.G. Evans, M.E. Gulden and M. Rosenblatt: Proc. R. Soc. Lond. A, vol. 361 (1978) pp.343-365.

[13] B.R. Lawn, A.G. Evans and D.B. Marshall: J. Am. Ceram. Soc., vol. 63 (1980) pp.574-581.

[14] D.B. Marshall, B.R. Lawn and A.G. Evans: J. Am. Ceram. Soc., vol. 65 (1982) pp.561-566.