Structural, Optical and Electrical Characterization of Mo Doped In2O3 Thin Films Prepared via Sol-Gel Spin Coating Technique

Saeed Mohammadi; Hossein Abdizadeh; Mohammad Reza Golobostanfard

doi:10.4028/www.scientific.net/AMR.576.607

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 576Structural, Optical and Electrical...

Structural, Optical and Electrical Characterization of Mo Doped In₂O₃ Thin Films Prepared via Sol-Gel Spin Coating Technique

Abstract:

The optically transparent conducting molybdenum doped indium oxide (IMO) thin films were deposited on glass substrates by sol-gel spin coating technique. The effect of various molybdenum contents in the range of 0.25–1 at.% on the structural, morphological, optical and electrical properties was studied. XRD results confirmed the formation of cubic bixbyite structure of In2O3 with preferred orientation along (222) plane. Microstructural studies show nearly spherical morphology for thin films with size in the range of 20-40 nm. The films doped with 0.25 at.% Mo found to exhibit a minimum electrical resistivity of 188×10-3 Ω.cm and an average optical transmittance of more than 80% in the visible region with a band gap of 3.85 eV.

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Periodical:

Advanced Materials Research (Volume 576)

Pages:

607-610

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.576.607

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Online since:

October 2012

Authors:

Saeed Mohammadi, Hossein Abdizadeh, Mohammad Reza Golobostanfard

Keywords:

Electrical Properties, IMO, Indium Oxide, Optical Property, Sol-Gel (SG), Spin Coating, Thin Film

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References

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