Spectral-Domain Optical Coherence Tomography for Material Detection

Abstract:

Optical coherence tomography is a non-invasive cross-sectional imaging technology for inhomogeneous samples. Spectral-domain optical coherence tomography is introduced to measure film and Silicon dovetail groove in this paper. A novel method is used to deal with the interference spectrum to improve the quality of the two-dimensional cross-sectional image. The experimental result shows the microstructure of the two samples can be clearly seen as expected. From the visualized two-dimensional cross-sectional imaging, the film thickness and the dimension of the Silicon dovetail groove are obtained with this technique. It is experimentally demonstrated that this system is useful for imaging the microstructure of the internal and surface of film and semiconductor. It can be further developed for other material detection in industrial fields.

• Periodical: Advanced Materials Research (Volumes 591-593)
• Pages: 1139-1142
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.591-593.1139
• Online since: November 2012
• Authors: Yu Wei Qin, Hong Zhao
• Keywords: Cross-Sectional Image, Measure, Optical Coherence Tomography

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