Research on Side-Insulation of Tool Electrode for Micro Electrochemical Machining

Gai Hong Liu; Yong Li; Xu Peng Chen; Shan Jin Lv

doi:10.4028/www.scientific.net/AMR.60-61.380

Paper Titles

Electrical Trimming of Boron-Doped Polysilicon Nanofilm Resistors Deposited at Different Temperatures
p.361

Simulation of the Optical Properties for Silicon Nano-Pillar Array Using Finite Difference Time Domain Method
p.367

A Uncooled α-Si Infrared Detector Using Polyimide as Thermal Isolation Layer
p.371

Preparation and Characterization of Micro Polypyrrole Electrodes for Supercapacitor
p.375

Research on Side-Insulation of Tool Electrode for Micro Electrochemical Machining
p.380

Influence of Electrolytic Products in Machining Gap on Micro ECM
p.388

Thermal Conductivity Measurement for Carbon-Nanotube Suspensions with 3ω Method
p.394

A Study on the Assembly and Improvement of Electrical Contact between Carbon Nanotube and Microelectrode
p.399

Preparation of Self-Assembly Monolayer by Scratching Si(100) Surface in the Presence of Aryl Diazonium Salts
p.406

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Research on Side-Insulation of Tool Electrode for Micro Electrochemical Machining

Abstract:

In micro electrochemical machining (micro ECM), side-insulation of tool electrode can significantly improve the machining accuracy, especially for high aspect ratio structures. This paper presented a new side-insulation approach for not only micro single electrodes but also micro array electrodes, in which spin-coating and room curing are used to coat the micro tool electrodes with a very thin film of polymer, followed by an end-rubbing process to remove the insulation material from the electrode end surfaces. Processing parameters of spin-coating were optimized experimentally, and side-insulated micro single electrodes with a double-layer epoxy coating of 3m thickness were prepared. Experiments were made to test the performance of the side-insulation film under simulated micro ECM conditions. And the results demonstrated good insulativity and high adherence strength in a 6-hour durability test. Also side-insulation for micro array electrodes was performed using this approach.