Improvement and Sensitivity Analysis of Placement Angle Optimization in Physical Vapor Deposition Process

Abstract:

Widely used to improve the lifespan of tools, Physical Vapor Deposition (PVD) coating process yields hard coating film by creating high-energy beam of coating particles or plasma ions. The quality of the coat is largely depended on its evenness, which is achieved solely by the know-how and experience of coating companies. In dealing with a large, unfamiliar-shape workpiece, coating companies need a logical way to determine the optimal placement of the workpiece in the PVD oven. This work presents the improvement of placement angle optimization for a five-degrees-of-freedom jig fixture with self-rotation. The sensitivity of errors in the physical placement is found to be small.

• Periodical: Advanced Materials Research (Volumes 602-604)
• Pages: 1652-1658
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.602-604.1652
• Online since: December 2012
• Authors: Temsiri Sapsaman, Sasithon Bland
• Keywords: Genetic Algorithm (GA), Optimization, Physical Vapor Deposition (PVD) Simulation

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