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A Simple Method to Prepare Indium Oxide Nanoparticles on Si (110)
Abstract:
Nanocrystalline indium oxide (In2O3) thin film was synthesized by thermal evaporation of indium on unheated Si (110) substrates, followed by wet oxidation process. XRD analyses showed the deposited In2O3 film is of high quality and have cubic structure. The Scherrer structural analysis revealed that the In2O3 film grown on Si (110) orientation has nanocrystalline structure with crystallite size of 2.53 nm. Photoluminescence (PL) spectrum showed a strong and broad emission at 574.9 nm with two shoulders at 547 nm and 604 nm which related to oxygen vacancies. Finally, the band gap of nanocrystalline In2O3 as determined from the PL spectrum was 2.15± 0.15eV.
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193-197
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December 2012
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© 2013 Trans Tech Publications Ltd. All Rights Reserved
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