Wear Behavior of Diamond-Like Carbon Film Coated by Filtered Cathodic Arc

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Abstract:

Diamond-like carbon (DLC films were deposited on NiFe coupon by Filtered Cathodic Arc (FCA) technique. Two different DLC thicknesses were selected to compare thickness dependency on film properties change. The mechanical property as wear resistance under cyclic heating condition was investigated by nanoindenter (Hysitron). The detail of DLC film composition change was also studied using X-ray Photoelectron Spectroscopy (XPS). The roles of heating in material composition and wear behavior of DLC films are discussed. The effect of DLC film thickness is also considered. The results showed that thinner DLC (2 nm) has higher carbon oxidation resulting that deteriorate in wear resistance as compare to thicker one (5 nm). The heating accelerates these oxidation and wear in this study. .

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Advanced Materials Research (Volumes 622-623)

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901-905

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December 2012

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© 2013 Trans Tech Publications Ltd. All Rights Reserved

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