Evaluation the Performance of Fault Detection for dEWMA Control System

Abstract:

Recently, the dEWMA control system has been applied extensively for the semiconductor manufacturing. However, this control scheme exhibits a problem is that the existing R2R control system is scarcely discussed and evaluated about the operation of fault detection. In view of this, the research would combine double exponentially weighted moving average (dEWMA) control, weighted sum squared residual (WSSR), and joint angle analysis (JAA) methods to execute the process control and evaluated the performance of fault detection. Using various process simulations, a better parameter condition in WSSR and JAA algorithm can also be found. At last, a critical step for superconducting wire was used to illustrate the detection procedure for verifying the feasibility in practical application.

• Periodical: Advanced Materials Research (Volume 630)
• Pages: 235-240
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.630.235
• Online since: December 2012
• Authors: Chih Hung Jen
• Keywords: dEWMA Control System, Fault Detection, Joint Angle Analysis (JAA), Weighted Sum Squared Residual (WSSR)

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