Synthesis of TiO2 Nanostructure by DC Reactive Magnetron Sputtering and Hydrothermal Technique

Vipa Khiannok; Vatcharinkorn Mekla; Supanit Porntheerapat

doi:10.4028/www.scientific.net/AMR.634-638.2311

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 634-638Synthesis of TiO2 Nanostructure by DC Reactive...

Synthesis of TiO₂ Nanostructure by DC Reactive Magnetron Sputtering and Hydrothermal Technique

Abstract:

Anatase and rutile TiO₂ nanostructure have been successfully synthesized via CD reactive magnetron sputtering and hydrothermal synthesis followed by post-treatment from titanium powder. The morphology and crystalline structure of the nanostructure are characterized in detail with X-ray diffraction (XRD), Field Emissiom Scanning Electron Microscope (FE-SEM), Scanning Electron Microscope (SEM), energy dispersive X- ray and energy dispersive x-ray analyzer (EDX). The pattern showed anatase and rutile phase crystalline structure. The thin films showed the surface as viewed uniform tiny spots distribution. TiO2 nanostructures were successfully synthesized using a simple hydrothermal synthesis method from TiO2 nan_{Subscript text}oparticles. The samples were synthesized by means of the hydrothermal reaction of TiO₂ nanoparticle of anatase and rutile phase. In a typical procedure, The time were varied, and cooled to room temperature, naturally. The samples showed structures of crystalline, anatase and rutile phases. They were morphology TiO₂ nanorods, TiO₂ nanowires and TiO₂ nano shape with the diameters of about 30-300 nm. The EDX analysis of an area containing a large amount of TiO₂ nanostructure reveals the existence of Na, Ti and O elements.