Fabrication of Nanopores on Different Thickness Membranes

Abstract:

In recent years, solid-state nanopores have been widely used in biotechnology for detecting single molecules. Here, we studied the influence of membrane thickness and Focused Ion Beam action time on the diameter of silicon nitride nanppores. The results showed that on the 300 nm thick silicon nitride membrane, the minimum pore was 170 nm in diameter; while on thinner membranes with the thicknesses of 200nm and 100nm, the minimum pore diameters were 100nm and 30nm respectively. And on the membrane of a given thickness, the minimum diameter of nanopore is determined by the minimum action time. Therefore the 100 nm membrane thickness is ideal for milling small nanopores.

• Periodical: Advanced Materials Research (Volume 647)
• Pages: 37-41
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.647.37
• Online since: January 2013
• Authors: Jing Lin Kong, Li Ping Liu, Yi Wen Chen, Hong Wen Wu, Quan Jun Liu, Hang Liu, Zhi Liang Zhao, Xiao Feng Ye, Hui Yao, Song Ying
• Keywords: Fabrication, Nanopore, Silicon Nitride, Thickness

References

[1] Howorka S, Cheley S and Bayley H 2001 Nat. biotechnol. 19 636.

[2] Kowalczyk S W, Tuijtel M W, Donkers S P and Dekker C 2010 Nano Lett. 10 1414.

[3] Li J, Stein D, McMullan C Branton D, Aziz M J and Golovchenko J A 2001 Nature 412 166.

[4] Storm A J, Chen J H, Ling X S, Zandbergen H W and Dekker C 2003 Nat. mater. 2 537.

[5] Schiedt B, Auvray L, Bacri L, Oukhaled G, Madouri A, Bourhis E, Patriarche G, Pelta J, Jede R and Gierak J 2010 Microelectron. Eng. 87 1300.

DOI: 10.1016/j.mee.2009.12.073

[6] Gadgil V and Morrissey J F 2004 Encyclopedia of Nanoscience and Nanotechnology 1 101.

[7] Lo C J, Aref T and Bezryadin A 2006 Nanotechnology 17 3264.