The Effects of Contents of Oxygen in Argon-Oxygen Mixed Gas on Polyethylene Terephthalate (PET) Films by CCP Discharge

Abstract:

In the present work, Polyethylene terephthalate (PET) films have been exposed to capacitive coupled plasma (CCP) to improve their surface properties for fabricated devices. Contact angle measurements and atomic force microscopy (AFM) showed an increase in surface roughness resulting in the decrease of contact angle. Surface composition and morphology of the films were analyzed by X-ray photoelectron spectroscopy (XPS) and AFM. It was found that the plasma treatment modified the surfaces both in chemical composition and morphology. Change of chemical composition made the polymer surfaces to be highly hydrophilic, which mainly depends on the increase in oxygen-containing groups. And the results of optical emission spectroscopy (OES) proved that appropriate content of oxygen in mixture gas can create the greatest number of active species to form O*-C causes groups on surface which can easily form C-O-metal bonds, lead to improve adhesion properties.

• Periodical: Advanced Materials Research (Volume 651)
• Pages: 257-262
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.651.257
• Online since: January 2013
• Authors: Yan Feng Xie, Hong Ying Zhou, Di Zhang, Han Wen Zhang, Yun Cheng Shi, Ying Guo
• Keywords: Capacitive Coupled Plasma (CCP), Hydrophilicity, PET Film, Surface Modification

References

[1] Chan-Hee Jung, Hwang-Woo Cho, In-Tae Hwang, Jae-Hak Choi, Young-Chang Nho, Jun-Sik Shin, Kyeong-Ho Chang, Radiation Physics and Chemistry (2011).

[2] Kisin, S., van der Varst, P.G. TH., de With, G., Thin Solid Films 515 (2007) 6853-6859.

DOI: 10.1016/j.tsf.2007.02.018

[3] Svorcik, V., Kotal, V., Slepicka. P., Blahova, O., Sutta, P., Hnatowicz, V., Polym. Eng. Sci. 46 (2006) 4137-4146.

[4] Ghosh, A., Schiraldi, D.A., J. Appl. Polym. Sci. 112 (2009) 1738-1744.

[5] Lee, W,J., Kim, Y.B., Thin Solid Film, 517 (2008) 1191-1194.

[6] Yu, Z.J., Kang, E.T., Neoh, K.G., Polymer 43 (2002) 4137-4146.

[7] F. Milde, K. Goedicke, M. Fahland, Thin Solid Films 279 (1996) 169-173.

DOI: 10.1016/0040-6090(95)08142-9

[8] J.F. Friedrich, W.E.S. Unger, A. Lippitz, I. Koprinarov, G. Kuhn, St. Weidner, L. Vogel, Surface and Coatings Technology 116-119 (1999) 772-782.

DOI: 10.1016/s0257-8972(99)00229-7

[9] J.F. Friedrich, R. Mix, G. Kuhn, Surface and Coatings Technology 200 (2005) 565-568.

[10] K.J. Kim, N. -E. Lee, M.C. Kim, J. -H. Boo, Thin Solid Films 398-399 (2001) 657-662.

[11] Soo Hong Kim, Su Hyeun Cho, N. -E. Lee, Hoon Mo Kim, Yun Woo Nam, Young-Ho Kim, Surface and Coatings Technology 193 (2005) 101-106.

[12] J.E. Andrew, P.E. Dyer, D. Forster, and P.H. Key, Appl. Phys. Lett. 43, (1983)717.

[13] K.J. Kim, N. -E. Lee, M.C. Kim, J. -H. Boo, Thin Solid Films 398-399 (2001) 657.

[14] Espedito Vassallo, Anna Cremona, Francesco Ghezzi, Daria Ricci, 84 (2010) 902-906.

[15] Charles Bishop, Roll-to-Roll Vacuum Deposition of Barrier Coatings 124 (2010) John Wiley &Sons, Inc. Hoboken, New Jersey, and Scrivener Publishing LLC, Salem, Massachusetts.