Large Area Uniform Microstructures on Silicon Surface Created with a Picosecond Laser Beam Scanning

Xi Yuan Wang; Yong Guang Huang; De Wei Liu; Bao Jun Wang; Xiao Ning Zhu; Hong Liang Zhu

doi:10.4028/www.scientific.net/AMR.651.327

Paper Titles

Effect of Solution Aging Time on Stability of Colorimetric Assay for Degradation Rate Evaluation of Porous Si in Artificial Cerebrospinal Fluid
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Numerical Simulation of Mesoscopic Concrete Cracking Evolution
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Oxidation of Acid-proof Steel Foil as a Method of Deposition of Phases Active in Nitrogen Oxides Decomposition on Metallic Monolith Walls
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Determination of Material Parameters of Concrete for Non-Linear Modeling
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Large Area Uniform Microstructures on Silicon Surface Created with a Picosecond Laser Beam Scanning
p.327

A Way to Weld Sheet Metal with Double-Electrode GMAW
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Machining and Tool Wear Mechanisms during Machining Titanium Alloys
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Ultra-Precision Machinability and Properties of Electroless-Nickel
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Ductile Mode Turning of Brittle Materials and its Practical Aspects
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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 651Large Area Uniform Microstructures on Silicon...

Large Area Uniform Microstructures on Silicon Surface Created with a Picosecond Laser Beam Scanning

Abstract:

We present the experimental results of picosecond pulse laser microstructuring of silicon in the SF6 atmosphere using the galvanometer scanning technique. With appropriate irradiation conditions, a large variety of surface microstructures even nanostructures were produced. By rapidly scanning, a uniform array of micro-crater structure with 10nm in depth is generated on the crystal silicon surface. At low scanning speed, large area uniform self-organizing micro-grating, micro-hole, or micro-cone structure can be produced by cumulative pulses irradiation. These results suggest that picosecond laser scanning technique is a flexible method to produce uniform surface micro-nanostructures, which exhibits great potential for applications in photoelectron devices, special surface marking and surface modification.

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Periodical:

Advanced Materials Research (Volume 651)

Pages:

327-332

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.651.327

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Online since:

January 2013

Authors:

Xi Yuan Wang, Yong Guang Huang, De Wei Liu, Bao Jun Wang, Xiao Ning Zhu, Hong Liang Zhu

Keywords:

Galvanometer Scanning, LIPSS, Microstructure, Picosecond Pulse Laser, Silicon

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