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Study on Bilayer-Type ZTO Thin Films Prepared by MOCVD
Abstract:
Bilayer-type ZTO thin films were prepared by MOCVD, metal organic chemical vapor deposition. As the films were investigated with UV spectrophotometer, XRD, SEM and other modern research methods, the optics and crystal properties of the ZTO thin films were researched. From the analysis of testing results, visible light transmittance of ZnO/SnO2-type film was superior to SnO2/ZnO-type film, and ternary compound, Zn2SnO4, was found in the two kinds of bilayer-type films. The priority of nucleation should emerged between the (100) crystal plane of ZnO and the (110) crystal plane of SnO2.
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673-676
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January 2013
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© 2013 Trans Tech Publications Ltd. All Rights Reserved
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