Methodology of Micro-Accelerometer Reliability

Yu Bin Jia; Qing Wen Huang

doi:10.4028/www.scientific.net/AMR.655-657.790

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 655-657Methodology of Micro-Accelerometer Reliability

Methodology of Micro-Accelerometer Reliability

Abstract:

The basic analysis methodology of micromachined accelerometer reliability are developed. The reliability of micro-accelerometer system are basically analyzed mathematically based on probability theory, indicating that the fracture strength distribution of accelerometer structure keep to Weibill distribution, and the stress distribution keep to normal distribution. Fracture reliability degree for micromachined accelerometer is defined as the probability that strength is greater than stress. From this, we can predict and evaluate various micro-accelerometer fracture reliability under shock load. The methodology of reliability is also commonly suitable for other MEMS devices.

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Periodical:

Advanced Materials Research (Volumes 655-657)

Pages:

790-794

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.655-657.790

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Online since:

January 2013

Authors:

Yu Bin Jia*, Qing Wen Huang

Keywords:

Micro-Accelerometer, Probability Density Function, Reliability, Shock Load

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