Experiment on Electroforming Ni-Fe Property for Micro Fabrication

Xiao Hu Zheng; Gu Feng

doi:10.4028/www.scientific.net/AMR.658.213

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 658Experiment on Electroforming Ni-Fe Property for...

Experiment on Electroforming Ni-Fe Property for Micro Fabrication

Abstract:

The relationship between the composition, coating microstructure and electromagnetic properties of electroforming Ni-Fe alloys was studied in this paper. And the optimal process parameters to obtain Ni-20%Fe deposition was as following: FeSO4•7H20 concentration was 6 g/L; PH value of the solution was 2.5; current density was 3.5 A/dm2; electrolyte temperature 55 °C. The results indicate that the Ni-Fe deposit is bright and compact, the crystal-planes of the plating were (111), (220) and (200). Electrodeposited Ni-20%Fe has a strong paramagnetism effect with the smallest remanence of 0.5 emu, The coercivity show a monotonic decrease with increasing Fe content in deposit, which proved that the electroformed Ni-20%Fe alloy has good electromagnetic property and could be used in MEMS actuator manufacturing.

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Periodical:

Advanced Materials Research (Volume 658)

Pages:

213-216

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.658.213

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Online since:

January 2013

Authors:

Xiao Hu Zheng, Gu Feng

Keywords:

Composition, Electromagnetism Property, MEMS, Ni-Fe Deposit

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