Effect of Sintering Temperature on the Properties of Porous Silicon Nitride Ceramics
In this study, the porous silicon nitride ceramics with low permittivity was prepared by decomposition reaction of Si2N2O. The effect of sintering temperature on the properties of composites was investigated. The results show that the sintering process of porous silicon nitride ceramics is liquid crease-densititive-crease gas in high temperature-forming close pore-break of close pores and crease open pores. The density is 0.9-2.44 g/cm3, the porosity of sample varies from 0-47%, and the permittivity can be well controlled from 2.2 to 4.8.
Takashi Goto, Yibing Cheng, Zhengyi Fu and Lianmeng Zhang
L. Li et al., "Effect of Sintering Temperature on the Properties of Porous Silicon Nitride Ceramics", Advanced Materials Research, Vol. 66, pp. 85-88, 2009