Fabrication of Indium Tin Oxide Targets by Spark Plasma Sintering and Hot-Pressing Sintering
The Indium Tin Oxide(ITO) is known as a poorly sinterable material. The Spark Plasma Sintering(SPS) and the hot-pressing sintering(HP) were used to fabricate Indium Tin Oxide Ceramics from ITO nanoparticles. The maximum bulk density of 7.02 g/cm2(relative density; 98.2% TD)was obtained when sintered in Ar at 1000oC for 1min by SPS sintering. While the bulk density of 7.08 g/cm2(relative density; 99% TD) was obtained when sintered in Ar at 1050 oC for 4h by HP sintering.
Takashi Goto, Yibing Cheng, Zhengyi Fu and Lianmeng Zhang
W. Guo et al., "Fabrication of Indium Tin Oxide Targets by Spark Plasma Sintering and Hot-Pressing Sintering", Advanced Materials Research, Vol. 66, pp. 96-99, 2009