Fabrication of Indium Tin Oxide Targets by Spark Plasma Sintering and Hot-Pressing Sintering

Wei Guo; Wei Min Wang; Hao Wang; Yu Cheng Wang; Zheng Yi Fu

doi:10.4028/www.scientific.net/AMR.66.96

Paper Titles

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Erosion Resistance of Al₂TiO₅/Al₂O₃ Composites to Molten Aluminum
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Fabrication of Indium Tin Oxide Targets by Spark Plasma Sintering and Hot-Pressing Sintering
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Low-Temperature Sintering and Microwave Dielectric Properties of the Zn₂SiO₄ Ceramics
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Thermal Shock-Resistance Performance of Al₂TiO₅/Al₂O₃ Composites
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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 66Fabrication of Indium Tin Oxide Targets by Spark...

Fabrication of Indium Tin Oxide Targets by Spark Plasma Sintering and Hot-Pressing Sintering

Abstract:

The Indium Tin Oxide(ITO) is known as a poorly sinterable material. The Spark Plasma Sintering(SPS) and the hot-pressing sintering(HP) were used to fabricate Indium Tin Oxide Ceramics from ITO nanoparticles. The maximum bulk density of 7.02 g/cm2(relative density; 98.2% TD)was obtained when sintered in Ar at 1000oC for 1min by SPS sintering. While the bulk density of 7.08 g/cm2(relative density; 99% TD) was obtained when sintered in Ar at 1050 oC for 4h by HP sintering.