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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 662Simulation of Large-Area Inductively Coupled...

Simulation of Large-Area Inductively Coupled Plasma Source

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Periodical:

Advanced Materials Research (Volume 662)

Pages:

812-818

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.662.812

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Online since:

February 2013

Authors:

Dou Wei, Chao Bo Li, Xia Yang

Keywords:

Edge Effect, Inductively Coupled Plasma, Large Plasma Source, Plasma Uniformity

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© 2013 Trans Tech Publications Ltd. All Rights Reserved

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