Servo Control of Thrust Position for 6DOF Magnetic Suspension Stage

Yong Yin Qu; Zhen Xiong Zhou

doi:10.4028/www.scientific.net/AMR.662.831

Paper Titles

Implementation of an Intelligent Telephone Dialing System Based on the Control of Steady-State Visual Evoked Potentials
p.807

Simulation of Large-Area Inductively Coupled Plasma Source
p.812

Design of Colliery High-Voltage Integrated Protector Based on DSP TMS320F2812
p.819

Levitation Control of a Planar Magnetic Levitation Stage Based on Improved Auto-Disturbance Rejection Controller
p.823

Servo Control of Thrust Position for 6DOF Magnetic Suspension Stage
p.831

Research on Residual Current Protective Device Based on Micro-Controller of MSP430
p.838

The Design and Implementation of Brushless DC Motor Control System
p.842

Some Noteworthy Aspects in Designing High-Speed PCB
p.846

Design of the Approved Low Power Energy Recovery Logic Circuit
p.851

HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 662Servo Control of Thrust Position for 6DOF Magnetic...

Servo Control of Thrust Position for 6DOF Magnetic Suspension Stage

Abstract:

A novel 6DOF magnetic suspension stage is studied in this paper, the magnetic suspension stage system includes a suspension system and a thrust servo system, and this paper only studies the thrust system. The thrust system is a nonlinear, multivariable, and strong coupling system. For achieving its precise servo control, we used the auto-disturbance rejection controller to observe the inner and outside disturbance, and to offset the system. The result of simulation and experiment shows that the control scheme applied in the thrust control system has better dynamic, static, and robust characteristics.

You might also be interested in these eBooks

Nanotechnology and Precision Engineering

View Preview

Info:

Periodical:

Advanced Materials Research (Volume 662)

Pages:

831-837

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.662.831

Citation:

Cite this paper

Online since:

February 2013

Authors:

Yong Yin Qu, Zhen Xiong Zhou

Keywords:

Flow Channel Structure, Numerical Simulation, Siphonic Bedpan

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] Won-jong Kim , Fabrication and Control of a 6-DOF Magnetic Levitation Stage with Nanopositioning Capability , [J]. Proceeding of the 2004 American Control Conference. 2004, 6: 2487.

DOI: 10.23919/acc.2004.1383838

Google Scholar

[2] Wenrong Song, Guofei Yu et al. Structure design research of magnet suspension precision stage in micro-electronic manufacture, [J]. Optics precision engineering. 2002, 6(3): 271-275.

Google Scholar

[3] Bleuler H. A survey of magnetic levitation and magnetic bearing types,. JSME International Journal 35(3) ：335~342. (2002).

DOI: 10.1299/jsmec1988.35.335

Google Scholar

[4] Chunwen Li, Yuankun Feng. Inverse system control method of multiple variation nonlinear control,. Beijing: Tsing Hua university publisher. (1991).

Google Scholar

[5] Bernhard Sprenger. Planar High Speed Linear Direct Drive With Submicron,. Precision. Swiss Federal Institute of Technology ETH Zurich, Diss. ETH No. 13065, (2006).

Google Scholar

[6] Qingding Guo, Chengyuan Wang et, Precision Control Technology of Linear AC servo System, [M]. Beijing: China Machine Press (2005).

Google Scholar

[7] Jingqing Han. Nonlinear PID controller, [J]. Automation Journa, 2002, 5(l): 110-116.

Google Scholar