The Influence of Ion Energy Distribution for Multiple Frequencies Driven

Abstract:

The voltages, resonant waves and frequencies how to influence on the ion energy distributions (IEDs) from multiple frequencies driven in capacitive discharges, it is important to analyze these phenomenon and mechanism in order to control the microelectronic processes of integrated circuit and develop the base theories of plasma physics. We focused on the function of the ion energy distributions under high and low frequencies (dual frequency) drive in capacitive discharges, we derived a model of computation of the multiple frequencies driven IEDs from analyzing theories. The model can analyze and predict the IEDs under different high and low frequencies driven, the results from the model are in good agreement with these important data from public publish.

• Periodical: Advanced Materials Research (Volume 664)
• Pages: 947-953
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.664.947
• Online since: February 2013
• Authors: Zhu Wen Zhou, Yuan Sheng Wang, Bo Kong
• Keywords: Computational Model, High-Frequency, Ion Energy Distributions (IEDs), Low Frequency, Multiple Frequencies Capacitive Discharge, Resonance Wave

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