Sintering of Ti-Doped Tungsten Trioxide Ceramic Targets

Abstract:

The Titanium-doped tungsten trioxide (Ti/WO3) targets with high density was prepared by sintering in oxygen atmosphere. The density, bending strength and Vickers hardness were measured. The morphologies and microstructures were characterized by XRD and SEM. The Ti/WO3 targets were used to prepare the film by magnetron sputtering .The film was characterized by Ultraviolet spectrophotometer. The results showed that 1040°C was the best sintering temperature for making Ti/WO3 ceramic targets. The relative density of the target was up to 92.18%. The visible light transmittance of the Ti/WO3 thin films reduced quickly along with the reduction of wavelength. Two absorb peaks at the wavelength of 384 nm and 480 nm were found, which would play an important role in making electro-chromic materials.

• Periodical: Advanced Materials Research (Volume 668)
• Pages: 686-690
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.668.686
• Online since: March 2013
• Authors: Zhong Jian Zhang, Cun Qi Liu, Ling Gao, Chao Xiao, Hai Tao Yang
• Keywords: Magnetron Sputtering, Sintering Titanium-Doped Tungsten Trioxide Ceramic Target, Thin Film

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