Effect of Growth Atmosphere on the Structural, Optical and Magnetic Properties of Fe-Doped In₂O₃ Films

Abstract:

Room temperature ferromagnetism was observed in Fe-doped In2O3 films deposited on fused quartz substrates by radiofrequency magnetron sputtering in N2 and O2 atmosphere, respectively. Results show that with increasing the O2 and N2 flux, the lattice constant increases, the optical band gap decreases, and the ferromagnetism weakens. Moreover, the decrease in the saturation magnetization for films deposited in N2 atmosphere is more apparent than that deposited in O2 atmosphere. We think the reason is that in our Fe-doped In2O3 films the ferromagnetism is mainly mediated by the oxygen vacancies, and as an acceptor defect, N ions can decrease the concentration of the oxygen vacancies to a greater extent than the O ions.

• Periodical: Advanced Materials Research (Volume 668)
• Pages: 757-761
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.668.757
• Online since: March 2013
• Authors: Peng Fei Xing, Shao Hua Sun, Ping Wu
• Keywords: Fe-Doped In₂O₃ Films, N₂ (O₂) Atmosphere, Oxygen Vacancy, Radiofrequency Magnetron Sputtering, Room Temperature Ferromagnetism

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