Electrochemical Deposition and Properties Research of ZnO Thin Films

Abstract:

The transparent ZnO films were deposited on the indium tin oxide (ITO) coated glass substrates by using the square wave potential deposition method. The conductive graphite plate is used for counter electrode, electrolyte consist of zinc nitrate and additive of electrochemistry, which is made up CTAB and potassium nitrate. Crystallinities of the films were examined by X-ray diffractometer. The morphologies of zinc oxide films were observed with atomic force microscope. Optical characteristics of zinc oxide layers were measured with UV–vis spectrophotometer. The optimal conditions for preparation of zinc oxide thin films with the square wave potential method were as follows: the deposition time was 6 min, concentration of zinc nitrate was 0.05mol/L, deposition temperature was 80 °C, and the annealing temperature was 500 º C. The average optical transmittance of the ZnO films is higher than 85% in the visible range. Moreover, the films have flat surface and small grain size.

• Periodical: Advanced Materials Research (Volume 669)
• Pages: 72-78
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.669.72
• Online since: March 2013
• Authors: Guang Ming Wu, Yao Ding, De Wen Gao, Guang Jian Xing, Yang Zhou, Tian Lan Yin
• Keywords: Electrochemistry, Square Wave Potential Deposition, ZnO Thin Film

References

[1] Lukas Schmidt-Mende, Judith L. Macmanus-Driscoll. ZnO-nanostrutures defects and devices[J]. Materials Today, 2007(10): 40.

DOI: 10.1016/s1369-7021(07)70078-0

[2] T. Pauport ,D. Lincot ,B. Viana , et al. Toward LaserEmission of Epitaxial Nanorod Arrays of ZnO Grown by Elect rode Position [J]. Applied Physics Letters, 2006 (89) : 233112.

DOI: 10.1063/1.2402223

[3] JOSPH B, GOPCHANDRAN K G, THOMAS P V, et al. A study on the chemical spray deposition of zinc oxide thin films and their structural and electrical properties[J]. Materials Chemistry and Physics, 1999, 58(1): 71-77.

DOI: 10.1016/s0254-0584(98)00257-0

[4] B M Ataev, A M Bagamadova. Thermally Stable, Highly Conductive and Transparent ZnO Layers Prepared in Situ by Chemical Vapor Deposition[J]. Materials Science and Engineering, 1999, B65: 159-163.

DOI: 10.1016/s0921-5107(99)00166-x

[5] T.K. Subramanyam, B. Srinivasulu Naidu, S. Uthanna1. Physical Properties of Zinc Oxide Films Prepared by dc Reactive Magnetron Sputtering at Different Sputtering Pressures [J]. Crystal Research and Technology, 2000, 35 (10): 1193-1202.

DOI: 10.1002/1521-4079(200010)35:10<1193::aid-crat1193>3.0.co;2-6

[6] Bae S H, Lee S Y, Kim H Y, et al. Comparison of the optical properties of ZnO thin films grown on various substrates by pulsed laser deposition[J]. Appl. Surface Sci., 2000, 16: 332-334.

DOI: 10.1016/s0169-4332(00)00781-9

[7] Nagase T, Ooie T, Sakakibara J. A novel approach to prepare zinc oxide films: excimer laser irradiation of sol-gel derived precursor films[J]. Thin Solid Films, 1999, 357(2): 151-158.

DOI: 10.1016/s0040-6090(99)00645-8

[8] HuangYanWei, YaoNing, Zhang Bing-lin [J], Journal of Functional material, 2006, 10: 1603-1605.

[9] GuJianFeng, FuWeiJia, Liu Ming. [J], Acta Physica Sinaca, 2007, 56(10): 5979-5984.

[10] Izaki M, Watase S, Takahashi H. [J] , Appl. Phys. Lett. , 2003, 83: 4930-4932.

[11] ZhangMingYang, LiShiShuai. [J]. Journal ofH ezeU niversity. 2009，31（5）：83-86.

[12] Izaki M, Omi T. Electrolyte optimization for cathodic growth of zinc oxide films. Journal of Electrochemical Society. 1996, 143: L53-L55.

DOI: 10.1149/1.1836529

[13] Izaki M, Omi T. Transparent zinc oxide films prepared by electrochemical reaction. Applied Physics Letter. 1996, 68: 2439-24.

DOI: 10.1063/1.116160