Optimization for MEMS Filter to Reduce Feed-Through and an Analysis Method Based on Polar Diagram

Guo Wei Han; Chao Wei Si; Jing Ning; Yong Mei Zhao; Guo Sheng Sun; Fu Hua Yang

doi:10.4028/www.scientific.net/AMR.677.74

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 677Optimization for MEMS Filter to Reduce...

Optimization for MEMS Filter to Reduce Feed-Through and an Analysis Method Based on Polar Diagram

Abstract:

This paper presents an optimization of polysilicon based RF MEMS filter to improve electric isolation and minimize the feed-through, raising the stop-band reject above 20 dB from the original 0.2 dB, and proposes a performance analysis methodology based on polar diagram, which could simplify and visualize the analysis. Intrinsic feed-through of the device is minimized by optimization of substrate in fabrication process, differing from the characterization method reported previously, which is simple and effective.

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Periodical:

Advanced Materials Research (Volume 677)

Pages:

74-78

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.677.74

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Online since:

March 2013

Authors:

Guo Wei Han, Chao Wei Si, Jing Ning, Yong Mei Zhao, Guo Sheng Sun, Fu Hua Yang

Keywords:

Feed-through Cancellation, MEMS Filter, Performance Enhancement, Polar Diagram

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