Michelson Interferometer for near Infrared Wavelengths

Abstract:

This paper presents an architecture to simplify a Michelson Interferometer, designed with MEMS technology in order to obtain the near infrared wavelengths in the range of [1620-1800 nm], which will be used in a non-invasive micro sensor of glucose. The input interferometer is fed with a white light source. The poli-silicon, superficial and bulk processes are utilized to design the architecture. The interferometer is based on dividing the design into three parts formed by two gears, a zipper and two mirrors at 90° each of one, for achieving resolution improvement without decreasing mechanical resistance of the parts. Each part is modeled mathematically and their behavior is verified using different analysis in-SolidWorksTM. On the other hand, the beamsplitter of the Michelson Interferometer is placed at 45° with respect to mirrors. The simulation results demonstrate the validity of the behavior of interferometer proposed.

• Periodical: Advanced Materials Research (Volume 677)
• Pages: 79-84
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.677.79
• Online since: March 2013
• Authors: Virginia Mendoza-Figueroa, Jesús de la Cruz-Alejo
• Keywords: Beamsplitter, Gear, MEMS, Michelson Interferometer, Micromirror, Point Source, Wavelengths

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