Preparation and Characterization of Tungsten Trioxide (WO₃) Thin Films

Abstract:

The thin films of WO₃ were prepared on cleaned microscopic glass substrates by the electron beam evaporation technique. The films were coated at room temperature using pure WO₃ pellets as source. The prepared films were further post heat treated at different temperatures (100°C to 350°C) for about 1hr in air. The optical properties of WO3 thin films were studied in detail. The increase in the density of the film as the annealing temperature increases have been confirmed by the transmittance spectra. The film annealed at 250°C shows a strong photoluminescence peak. The peak intensity is found to be less for all other temperature. The observed results were discussed in terms of crystalline nature of WO₃.

• Periodical: Advanced Materials Research (Volume 678)
• Pages: 32-36
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.678.32
• Online since: March 2013
• Authors: Raveendran Lavanya, Gandhimathinathan Saroja, Veerapandy Vasu
• Keywords: Annealing, Electron Beam Evaporation, Tungsten Trioxide

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