New Estimation Method of Sample Properties in Dynamic AFM

Chi Bum Lee; Gayathri Mohan

doi:10.4028/www.scientific.net/AMR.684.377

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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 684New Estimation Method of Sample Properties in...

New Estimation Method of Sample Properties in Dynamic AFM

Abstract:

This study presents a novel estimation method of sample properties in dynamic mode Atomic Force Microscope (AFM). A cantilever mock system without the interaction with sample is used to generate a reference trajectory for deflection and the control synthesis problem is posed in a robust optimal control and multi-objective LMI framework. This design assumes the nonlinear tip-sample interaction force as a disturbance and estimates it through disturbance rejection technique. The sample topography and properties can be obtained by interpreting the estimated tip-sample interaction force and applying tip-sample interaction models.

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Periodical:

Advanced Materials Research (Volume 684)

Pages:

377-380

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.684.377

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Online since:

April 2013

Authors:

Chi Bum Lee, Gayathri Mohan

Keywords:

Atomic Force Microscopy (AFM), Dynamic AFM, Mock System, Property Estimation

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References

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