Based on the principle of micro electrical discharge machining (EDM), a reversible machining method is proposed, which can achieve depositing or removing selectively metal material for the fabrication of micro structures. It is easy to transform the machining process from deposition to removal in one machining system. The characteristics of the deposited material show that the components of deposited material are almost the same as those of the tool electrode, and the metallurgical bonding has formed on the interface between the deposited material and the base. Moreover, the deposited material has well machinability in different micro EDM selective removal process, including micro EDM die-sinking and micro EDM milling. As a result, a micro square column with 0.1mm in side length, 0.88mm in height and a micro cylinder with 0.14mm in diameter, 1.18mm in height were fabricated by using the micro reversible EDM process.