Masked and Unmasked Machining of Glass by Micro Abrasive Jet

Y.F. Qiu; Cheng Yong Wang; J. Wang; Yue Xian Song

doi:10.4028/www.scientific.net/AMR.69-70.182

Paper Titles

Predicted Rake Face Wear of PCBN Cutting Tools in High-Speed Precision Hard Cutting
p.163

Cutting Force Modeling in Precision Turning 3J33 Alloy for Tool with Nose Radius
p.167

Numerical Simulation on Grinding of Advanced Ceramics
p.172

Experimental Research of Micro Reversible Electrical Discharge Machining
p.177

Masked and Unmasked Machining of Glass by Micro Abrasive Jet
p.182

Research on Material Removal Characteristics of Nanoparticle Colloid Jet Machining
p.187

A Survey of the Machining Characteristics and Mechanical Polishing Technology of CVD Diamond Films
p.192

Mould Machining of Structural Surface Based on Liquid-Solid Two Phase Abrasive Flow
p.198

Modeling the Minimum Chip Thickness in Orthogonal Micro-Cutting Based on Plastic Strain Gradient
p.203

HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 69-70Masked and Unmasked Machining of Glass by Micro...

Masked and Unmasked Machining of Glass by Micro Abrasive Jet

Abstract:

The micro abrasive jet machining is used to make the microfluidic channels on the glass substrate. Based on the tests with or without masks, the structure profile and erosion rate with different basic machining parameters, such as nozzle standoff distance, scanning speed, abrasive mass flow rate etc. are investigated. The optimum parameters for micro-structure machining of glass is discussed. The effect of the secondary rebounding particles in mask underetching was analyzed using oblique machining. And the flux effect was also studied comparing with the unmasked machining.