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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 690-693Phase Evolution and Mechanical Properties of Cr-C...

Phase Evolution and Mechanical Properties of Cr-C Coatings Deposited by Reactive Unbalanced Magnetron Sputtering Process

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Abstract:

Cr-C coatings with gradient Cr/CrN/CrCN inter-layers were studied to elucidate the effects of carbon contained on the mechanical properties and microstructures of the deposited coatings. The coatings were deposited by using a reactive sputtering system with constant total flow rate, target current and substrate bias. Percentage of C₂H₂ flow rates were varied from 10 % to 50 %. Carbon contains in the film were measure by EDS. Mechanical properties of the coatings were evaluated with micro-indentation, scratch tester, ball-on-disk tribo-tester. Microstructures of the films were characterized by SEM, TEM, and X-ray diffractermeter. The experimental results show that carbon contain increase from 21.6 %to 99.5 % with respect to C₂H₂ flow rates varied from 10 %, 20 %, 30 %, 40 %, 50%. And the phase of coatings change from Cr solid solution to Cr+Cr₂₃C₆+ amorphous diamond like carbon (DLC) and then to DLC +Cr₇C₃ and then to DLC+ Cr₃C₂+Cr₇C₃. The hardness of the coatings increase with C₂H₂ flow rate increased and achieved the maximum value of Hv1815 at 50% C₂H₂ flow rate. The coefficient of friction decreases from 0.630 to 0.285 when C₂H₂ flow rate increased from 10% to 50%. The wear rate decreased with increasing the C₂H₂ flow rate.

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Periodical:

Advanced Materials Research (Volumes 690-693)

Pages:

2155-2170

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.690-693.2155

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Online since:

May 2013

Authors:

Yu Sen Yang, Wen Yi Huang

Keywords:

C₂H₂ Flow Rate, Cr-C Coatings, Reactive Sputtering

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© 2013 Trans Tech Publications Ltd. All Rights Reserved

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