Quantitative Analysis of Lateral Setting Error in Two-Point Method

Guo Qing Ding; Xin Chen; Hong Wang; Li Hua Lei; Yuan Li

doi:10.4028/www.scientific.net/AMR.690-693.3235

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 690-693Quantitative Analysis of Lateral Setting Error in...

Quantitative Analysis of Lateral Setting Error in Two-Point Method

Abstract:

In a multiple probes scanning system for a high precision straightness measurement, the lateral setting error between probes is ignored generally due to the average effect in the range of the aperture of the probes. In this paper, we study a two displacement sensors scanning system. Firstly, the principle of two-point method which is based on the natural extension method is introduced. Then, the influence of the lateral setting error between two probes is analyzed quantificationally when the discrete Fourier transform algorithm is applied. It is shown that a relative evaluation error within the range of 1% can be obtained if the lateral setting error is smaller than 1.5% of the sampling interval as long as the spatial wavelength of the evaluated profile is longer than the probe interval. The effectiveness of the results of the quantitative analysis is confirmed by computer simulations.