Design and Simulation of a MEMS Torsional Micromirror

Yi Bo Song; Zhi Gang Yan

doi:10.4028/www.scientific.net/AMR.694-697.1553

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Design and Simulation of a MEMS Torsional Micromirror
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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 694-697Design and Simulation of a MEMS Torsional...

Design and Simulation of a MEMS Torsional Micromirror

Abstract:

In this paper, we designed an electrostatic driving MEMS torsional micromirror. The operation principle of the torsional micromirror is analyzed. Based on the analysis, a set of optimized design parameters of the micromirror is suggested. The design optimization of the micromirror is also performed with MathCAD software. At last an ANSYS simulation is achieved in the paper, which proves that the micromirror can provide a maximum workable torsional angle rotation of ±0.55º with corresponding driving voltage of 17.5V.

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Periodical:

Advanced Materials Research (Volumes 694-697)

Pages:

1553-1557

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.694-697.1553

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Online since:

May 2013

Authors:

Yi Bo Song, Zhi Gang Yan

Keywords:

MEMS Electrostatic Torsional Micromirror

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References

[1] Kaigham. J. Gabriel, "Miroelectromechnical Systems (MEMS) Tutorial," International test conference, IEEE, vol.17 1981, pp.433-411.

Google Scholar

[2] Jian Ping Zhao1and Hua Ling Chen1 "A study on the coupled dynamic characteristics for a torsional," Microsystem Technologies, Vol 11,2005, pp.1301-1309

Google Scholar

[3] R.K. Tyson, Principles of Adaptive Optics, Academic Press, 1991.

Google Scholar

[4] Jeremy A. Walraven, "Introduction to Applications and Industries for Microelectromechanical Systems (MEMS)," itc, p.674, International Test Conference 2003, 2003.

DOI: 10.1109/test.2003.1270896

Google Scholar

[5] J.L. Griffin, S.W. Schlosser, G.R. Ganger and D.F. Nagle. "Modeling and performance of MEMS based storage device. Proc. of ACM SIGMETRICS, pp.56-65, June 2000.

DOI: 10.1145/345063.339354

Google Scholar