Information Processing of Precision Positioning Stage

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Abstract:

The information processing is an effective approach to realize the characteristic of the precision positioning stage. The analysis and comparison between the normal location data and the location data with oscillation reveal the frequency response of the source which causes the oscillation. The compensation efficiency of the control system is explained by the spectral analysis of the compensating command and real-time feedback displacement.

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Periodical:

Advanced Materials Research (Volumes 694-697)

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1869-1872

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May 2013

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© 2013 Trans Tech Publications Ltd. All Rights Reserved

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