Design Optimization of MEMS Based LLC Tunable Resonant Converter for Power Supplies on Chip

Abstract:

In this paper, a novel MEMS based LLC converter is proposed for on chip power supplies. The design is optimized based on commercially available Metal MUMPs process for fabrication. The resonant frequency is optimized at 20MHz and MEMS based variable capacitor is fabricated on the chip to tune the peak resonance frequency of circuit which varies due to the load variations. The Design is simulated in FEM based numerical software COMSOL and Intellisuite. According to analysis the magnetizing inductance of 42nH and leakage inductance of 40nH has been achieved from 16 mm² rectangular coil transformer. The total capacitance of 1500pF has been achieved from parallel plate capacitors and variation of 3pF has been achieved from variable capacitor.

• Periodical: Advanced Materials Research (Volume 705)
• Pages: 258-263
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.705.258
• Online since: June 2013
• Authors: Fahimullah Khan, Yong Zhu, Jun Wei Lu, Dzung Dao
• Keywords: Leakage Inductance, Magnetizing Inductance, Metal MUMPs, Resonant Converter, Tunable Capacitor

References

[1] T. S. Chan, C. L. Chen, LLC Resonant Converter for Wireless Energy Transmission system with PLL control, ICSET (2008). Taiwan, A247, p.136–139, (2008).

DOI: 10.1109/icset.2008.4746987

[2] Q. Fang, S Lee, Developing a wireless Implantable body sensor network in MICS band, IEEE Transactions on Information technology in biomedicine, vol. 15, no. 4, july 2011.

DOI: 10.1109/titb.2011.2153865

[3] S. De Simone, C. Adragna, C. Spini, Design guideline for magnetic integration in LLC resonant converters, International Symposium on power electronics, SPEEDAM, (2008), p.950–957.

DOI: 10.1109/speedham.2008.4581225

[4] B. Lu, W. Liu, Y. Liang, F. C. Lee, Optimal Design Methodology for LLC resonant converter, IEEE, (2006), pp.533-538.

[5] M. Mino, T. Yachi, A. Tago, K. Yanagisawa, and K. Sakakibara ,Planar Micro transformer with Monolithically-integrated rectifier diodes for Micro-switching converters, IEEE Transaction on Magnetics, Vol. 32, no. 2, March (1996), pp.291-295.

DOI: 10.1109/20.486336

[6] N. Wang, T. O'Donnell, S. Roy, S. Kulkarni, P. Mccloskey and C. O' Mathuna , Thin Film Microtransformer integrated on Silicon for Signal Isolation, IEEE Transactions on Magnetics, vol. 43, no.6, June (2007), pp.2719-2721.

DOI: 10.1109/tmag.2007.892593

[7] R. Wu, J. K. Sin, A novel Silicon-Embedded Coreless Transformer for Isolation DC-DC Converter Application. Proc. Of 23rd International Symposium on power Semiconductor Devices & IC's, San Diego, May (2011), pp.352-355.

DOI: 10.1109/ispsd.2011.5890863

[8] S.C. Mathuna, T. Donnell, Magnetics on Silicon:An Enabling Technology for power supply on chip, IEEE Transaction on powerelectronics, vol. 20, no.3, May (2005), pp.585-592.

DOI: 10.1109/tpel.2005.846537

[9] K. Onizuka, H. Kawaguchi, M .Takamiya,Stacked-chip Implementation of on-chip buck converter for Power-Aware distributed power supply systems, IEEE, (2006). pp.127-130.

DOI: 10.1109/asscc.2006.357868