Microfabrication and Characterization of Stack Coupled Inductor Coils for Magnetic Sensors and Actuators

Abstract:

A Planar square stack coupled inductor coils on silicon substrate has been fabricated using MEMS technology. The fabrication process utilized a simple, cost effective process technique as well as CMOS compatible resulting to a reproducible and good controlled process. The basic characteristics of the coupled inductors were discussed in wide range of operating frequency. The analysis results showed that the geometry of the inductor coil strongly affects the basic characteristics of the coils. The results of the study have promised a good prospect for the development of fully integrated planar magnetic field generator for sensing and actuating purposes.

• Periodical: Advanced Materials Research (Volume 705)
• Pages: 270-274
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.705.270
• Online since: June 2013
• Authors: Jumril Yunas, Yeop Majlis Burhanuddin, Eka Pawinanto Roer
• Keywords: Actuator, Coupled Inductor, MEMS Fabrication, Sensor, Stacked Planar Coils

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