The Improvement of the Spin Coater and its Patented Project Design

Abstract:

A rotary spin-coating technology project is provided by the utility model patent in this work. It includes vacuum pump and chassis, speed display, power switch, suction piece switch, start switch and the speed control switch on the chassis panel, motor and speed controller in the chassis connected to the outside of the chassis bracket, the bracket beams fixed hanging umbrella cover, the ring hood under the umbrella cover on top of the face, the piece prop and tachometer probe in the ring hood, the chip tray fixed extended chassis top surface motor shaft, there is a solution injection tube on the top of the sheet tray in project; it has an annular heater chip at the bottom of the tray within the annular cover sheet around the motor shaft; In addition, there is an ultrasonic humidification pump, the pump output of the ultrasonic humidification communicating through the humidifying tubes with the annular cover. In above mentioned the annular cover connected to the exhaust pipe and the annular cover interior chamber. A temperature sensor is at the inside of the annular cover, and a temperature display panel on the panel of the chassis.

• Periodical: Advanced Materials Research (Volumes 706-708)
• Pages: 1631-1634
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.706-708.1631
• Online since: June 2013
• Authors: Nai Gen Li, Ke Gao Liu, Yong Xu
• Keywords: Film Materials, Spin Coater, Spin Coating Method

References

[1] V. Cregan, S.B.G. O'Brien: Journal of Colloid and Interface Science Vol. 314 (2007), p.324

[2] H. Xu, W. Yan, C. L. Tang: Chinese Chemical Letters Vol. 22 (2011), p.354

[3] J. Y. Jung, Y. T. Kang: International Journal of Heat and Mass Transfer Vol. 53 (2010), p.1712

[4] M. Chen, B. H. Kim: Journal of Membrane Science Vol. 360 (2010), p.461

[5] T. Ogi, L. Balam M.L. Iskandar, K. Okuyama: Colloids and Surfaces A: Physicochem. Eng. Aspects Vol. 297 (2007) p.71

[6] R. Hui, Z. Wang, S. Yick: Journal of Power Sources Vol. 172 (2007) , p.840

[7] F. Zhang, M. Sun, S.Xu: Chemical Engineering Journal Vol. 141 (2008), p.362

[8] M.C. Lin, C.K. Chen: Applied Mathematical Modelling Vol. 36 (2012) , p.2536

[9] N. Gokon, T. Kodama, N. Imaizumi: International journal of hydrogen energy Vol. 36 (2011) , p.(2014)

[10] K. Hwang, S. Min, Y. Park: Surface and Coatings Technology Vol. 137(2001) , p.205

[11] D. P. Birnie, D. E. Haas: Optics and Lasers in Engineering Vol. 48 (2010) , p.533

[12] C.Y.W. Lin, A. Nakaruk, C.C. Sorrell: Progress in Organic Coatings Vol. 74 (2012) , p.645

[13] A. B. D. Nandiyanto, T. Ogi, F. Iskandar: Chemical Engineering Journal Vol. 167 (2011) , p.409

[14] F.K. Liu, Y.C. Chang, F.H. Ko: Microelectronic Engineering Vol. 67-68 (2003) , p.702