Research on Drive-Part Control Strategy under the Influence of Environmental Temperature
In order to reduce the influence of environmental temperature changes, the drive part mixed control strategy of PI and based on output feedback is presented in this paper. Firstly, the mathematic model of thermal drive-parts was established by experiments and conservation law of energy. Then the controller based on output feedback was designed .At last the PI controller using predicting model to reduce the influence of controller was designed. AAAAA show that 136 nm control precision was obtained by PI control and 20 nm control precision was obtained by the combination method of PI and control with environmental temperature change of 6°C AAAAAAA .
X. X. Hu et al., "Research on Drive-Part Control Strategy under the Influence of Environmental Temperature", Advanced Materials Research, Vol. 721, pp. 425-432, 2013