A Finite Element Simulation of the Surface Acoustic Wave Devices Based on Polarized Piezoelectric Ceramic
In this paper, the basic principles of the surface acoustic wave (SAW) formed in the periodically poled piezoelectric ceramic has been elaborated theoretically. The modal and harmonic analyses has been performed by utilizing ANSYS software for the periodically poled piezoelectric composite structure (adjacent piezoelectric polarization direction opposite) which composed by piezoelectric ceramic (PZT-4). The data of simulation result have been processed and obtained the following conclusion: the surface wave can be formed in the periodically poled piezoelectric domain with a relatively large amplitude, the motion track of each particle in the SAW is an ellipse by combined the transverse modal displacement and longitudinal modal displacement of each surface node. These conclusions are same as the theoretical values, the simulation results are very useful for designing SAW device with periodically poled piezoelectric ceramic.
P. Cao and J. L. Zhu, "A Finite Element Simulation of the Surface Acoustic Wave Devices Based on Polarized Piezoelectric Ceramic", Advanced Materials Research, Vol. 721, pp. 483-487, 2013