Micromachined Pressure Sensors on Optical Fiber Tip
This paper reports the development of a miniature pressure sensor on the optical fiber tip for in vitro measurements of rodent intradiscal pressure. The sensor element is biocompatible and can be fabricated by simple, batch-fabrication methods in a non-cleanroom environment with good device-to-device uniformity. The fabricated sensor element has an outer diameter of only 366 μm, which is small enough to be inserted into the rodent discs without disrupting the structure or altering the intradiscal pressures. In the calibration, the sensor element exhibits a linear response to the applied pressure over the range of 0 - 70 kPa, with a sensitivity of 0.0206 μm/kPa and a resolution of 0.17 kPa.
Selin Teo, A. Q. Liu, H. Li and B. Tarik
X.M. Zhang et al., "Micromachined Pressure Sensors on Optical Fiber Tip", Advanced Materials Research, Vol. 74, pp. 149-152, 2009