Design and Characterization of a MEMS-Microfluidic Sensor for Rheological Applications
We present our efforts to design, manufacture, and characterize a capillary viscometer aimed at performing very high shear rate rheology of complex fluids, and fabricated using hybrid MEMS/microfluidic technology. We demonstrate that microfluidic and MEMS technologies can be combined to integrate fluidic channels with microfabricated stress and flow sensors, enabling rheological measurements at shear rates up to 500000s-1 and beyond.
Selin Teo, A. Q. Liu, H. Li and B. Tarik
H. Berthet et al., "Design and Characterization of a MEMS-Microfluidic Sensor for Rheological Applications", Advanced Materials Research, Vol. 74, pp. 81-84, 2009